In particular in the semiconductor industry, extensive polishing processes are indispensable. The required slurry/water mixture obtained after the CMP process has previously been a pure waste product and must be subjected to a complicated wastewater treatment, neutralization and disposal. In addition to substantial cost saving potentials, the recycling of the slurry also contributes to clearly optimizing process quality.
Semiconductor market Our recycling systems offer ideal solutions for:
Chemical-mechanical planarization
The advantages at a glance:
Dicing and grinding process
The cutting and grinding process in semiconductor production leads to the removal of nano particles made of rare earths and other raw materials with the addition of ultrapure water. The use of our patented recycling systems allows these precious components to be recycled to the production process or to be reused.
The advantages at a glance:
Industrial applications
Wherever precious and rare raw materials are being processed in combination with water, recycling systems are indispensable. Not only water but also expensive raw materials, such as rare earths and noble metals, can be processed and reused.
Our recycling systems offer ideal solutions not only to the semiconductor industry, but also to a large number of demanding applications, for example in chemistry and the paper industry. However, our systems are also used in agricultural applications.
We will be glad to advise you on site. Our transportable ultra-compact module allows you to get an idea of the advantages of the recycling process quickly, easily, and straightforward. We prepare your materials, which you then, following our meeting, can subject to your individual tests and evaluations. We will, of course, give you expert advice on the calculation of the profitability and on the process and the analytics.
Contact us!
We will find the ideal solution for your individual application.
FäthGroup Recycling Technology