New Patented Recycling Systems for Slurry and Ultrapure Water for the Semiconductor Market

As first company worldwide the HighQ-Factory GmbH, a company of the Faeth Group, launched a new patented recycling system for the semiconductor market. The recycling system helps for example optimizing CMP processes as well as dicing & grinding processes.

In the system, the incoming waste water, which contains a mixture of ultrapure water, slurry and other chemical materials, passes through several complex filtration and ultra-filtration steps. As a result, the mixture is separated back into its original raw materials and can be re-used in the production process. The patented, self-cleaning backflush process of the ultrafiltration modules leads to an effectively longer life cycle of the high cost filter elements. Subsequently, the ultra-filters are generally replaced after a period of more than a year, further increasing the system‘s cost efficiency. The result is, for the first time it is now possible to separate wastewater into its principal components – efficiently and profitably.

Besides the environmental aspect there are numerous advantages for this recycling technology:

  • Cost savings up to 85 % by reusing slurry´s raw materials and ultrapure water.
  • CMP process safety is often significantly improved as possible microscratches can be reduces to up to 35 %.
  • The demand for new raw materials is significantly reduced up to 85 %, only 15 % of new raw material must be added.
  • Health and environmental protection by filtering out of harmful nano particles and by reducing the consumption of non-renewable raw materials.

Recyclable materials are:

  • Ultrapure water
  • Oxyde slurry
  • Tungsten slurry
  • Ceria slurry
  • Copper slurry
  • Lithium tantalate
  • Chemical solids
  • Rare earth

HighQ-Factory GmbH provides forward-looking and environmentally friendly process solutions for the semiconductor industry. The company mainly focuses on the recycling of ultrapure water and chemical resources through an automated ultrafiltration process. HighQ-Factory is part of the Faeth Group of companies. As a family-run business operating globally, the Faeth Group of companies is a worldwide leader in the development, manufacturing, installation, qualification and analysis of gas and chemical delivery systems. Combined with the ability to produce individual, customer-specific solutions the company has earned a strong reputation in the semiconductor, photovoltaic and LED industries. Founded in 2004, the Faeth Group has 350 employees.

SEMI Member Press Release Apr 17, 2018